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Vacuum Spin Coater LVSC-A10 is a benchtop unit which can coat substrates of maximum size 4 inch. It has maximum speed of 9999 rpm and a 5 step spin controller option. Variable sizes of vacuum chuck, oil-less vacuum pump is included in the package. It is used in nanotechnology, electronics, semiconductor industry etc.
Maximum Wafer Diameter | 4 inch |
Speed adjustable range | 100 to 9999 rpm, adjustable |
Acceleration range | 100 to 9999 rpm/s |
Speed resolution | 1 rpm |
Max single step time | 3000 s |
Time resolution | 1 s |
Programmable control | 5 programmable, 5steps |
Motor | 75 W Brushless Motor |
Vacuum plate (chuck) | O. D of 10 mm, 25 mm, 55 mm |
Working voltage | AC220 V, 60 Hz |
Dimension | 250×210×200 mm |
Name of Accessories | Quantity |
Spin coater | 1 set |
Vacuum pump | 1 set |
Vacuum plate | 3 pieces |
It is used to apply thin films on the substrates in organic research, semiconductor industry etc.